Helium Ion Microscope (HIM)

      Description of Capabilities

  • 10 - 35 keV Helium gas field ion source
  • Nanopatterning Software  (FIBICS)
  • Everhart Thornley secondary electron detector
  • Electron flood gun for charge compensation
  • 5 axis motorized stage
  • transmission camera (Medipix 256 x 256 pixels 55 microns, avalanche photodiode array)
  • (Funded by CFI/BCKDF, 2016)