SOI Vertical standing mirrors

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Project Abstract

The purpose of this particular project is to implement vertically standing mirrors using SOIMUMPS technology, offered by Cronos. 

These mirrors are relatively small, approximately 100 m 100 m built on a SOI substrate. An important aspect of this design is the trench (holes) in the SOI substrate. Such technology has been classified in general terms as MEMS (Micro-Electro-Mechanical Systems). More specifically, this implementation is categorized as optical MEMS. It is envisioned that such systems would be used in telecommunication/photonic switching systems.

 

 

What's  New

First website posted on

Key Milestones

October, 2003 - Chip return/testing
June 23, 2003 - Submitted the designs for  fabrication

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Last updated: 08/19/03.