The purpose of this particular project is to implement
vertically standing mirrors using SOIMUMPS technology, offered by Cronos.
These mirrors are relatively small, approximately 100 µm ×
100 µm built on a SOI substrate. An important aspect of this design is the
trench (holes) in the SOI substrate. Such technology has been classified in
general terms as MEMS (Micro-Electro-Mechanical Systems). More specifically,
this implementation is categorized as optical MEMS. It is envisioned that
such systems would be used in telecommunication/photonic switching systems.