Simon Fraser University
Engaging the World

Course Outlines

Spring 2019 - ENSC 851 G100

Integrated Circuit Technology (3)

Class Number: 5220

Delivery Method: In Person

Overview

  • Course Times + Location:

    Jan 3 – Apr 8, 2019: Mon, 4:30–6:20 p.m.
    Burnaby

  • Exam Times + Location:

    Apr 13, 2019
    Sat, 7:00–10:00 p.m.
    Burnaby

Description

CALENDAR DESCRIPTION:

Review of semiconductor physics. Technology of semiconductor devices and integrated circuits: material evaluation, crystal growth, doping, epitaxy, thermal diffusion, ion implantation, lithography and device patterning, and thin film formation. Design and fabrication of active and passive semiconductor devices, packaging techniques and reliability of integrated circuits.

COURSE DETAILS:

Hands‑on introduction to Integrated Circuit Fabrication. Lectures on theoretical background and application of IC fabrication processes. Laboratory gives practical experience of each process. Students build an IC from the bare silicon to final working device. Class notes are posted on canvas.sfu.ca

Grading

  • Laboratory reports 30%
  • Problem assignments 10%
  • Midterm 20%
  • Final exam 40%

NOTES:

Students will work in 2-3 people teams which start with a bare silicon wafer and create finished IC's which include diodes, solar cells, transistors and some characterization test devices. All the process steps will be done by the students, who will also characterize the parameters for each step.  Electrical characterization of the devices (diodes etc) will also be accomplished.  Students get to keep samples of their own IC's. Two Laboratory reports must be submitted.

Graduate students in the MASc or PhD program have two options. 

  • They can take the lab up to end of Week 5 and do the first report, and then do a Major processing project in the laboratory during the rest of the course. Major projects are only available for graduates doing microfab involved research in their thesis program.
  • Alternatively they may do the entire laboratory like the undergraduate, with two Lab reports and extended tests on lab 2.

REQUIREMENTS:

Prerequisite:
Students need understanding of basic transistor and diode operation. ENSC 225 (Microelectronics I) or MSE 251 or PHYS 365 or equivalent.  

Course Enrollment:
Due to limited lab space, enrollment is by application only.

The application is on the CourSys website: https://coursys.sfu.ca/forms/ensc-851-circuit-technology/

Materials

REQUIRED READING:

Plummer, Deal & Griffin, Silicon VLSI Technology, Fundamentals, Practice, and Modeling, Prentice Hall,2000.
ISBN-10: 0130850373

RECOMMENDED READING:

R.C. Jaegar, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
ISBN:0201444941

W.S. Ruska, Microelectronic Processing, McGraw‑Hill, 1987.
  
S. Campbell, The Science and Engineering of Microelectronic Fabrication 2nd Ed, Oxford Univ. Press., 2001

Graduate Studies Notes:

Important dates and deadlines for graduate students are found here: http://www.sfu.ca/dean-gradstudies/current/important_dates/guidelines.html. The deadline to drop a course with a 100% refund is the end of week 2. The deadline to drop with no notation on your transcript is the end of week 3.

Registrar Notes:

SFU’s Academic Integrity web site http://www.sfu.ca/students/academicintegrity.html is filled with information on what is meant by academic dishonesty, where you can find resources to help with your studies and the consequences of cheating.  Check out the site for more information and videos that help explain the issues in plain English.

Each student is responsible for his or her conduct as it affects the University community.  Academic dishonesty, in whatever form, is ultimately destructive of the values of the University. Furthermore, it is unfair and discouraging to the majority of students who pursue their studies honestly. Scholarly integrity is required of all members of the University. http://www.sfu.ca/policies/gazette/student/s10-01.html

ACADEMIC INTEGRITY: YOUR WORK, YOUR SUCCESS