Summer 2019 - MSE 711 G100

Introduction to MEMS (3)

Class Number: 5969

Delivery Method: In Person


  • Course Times + Location:

    Tu 2:30 PM – 4:20 PM
    SUR 5280, Surrey

    Th 2:30 PM – 3:20 PM
    SUR 5280, Surrey



Analytical tools to understand the basics of the fabrication, operation, and design of MEMS (microelectromechanical systems). Fundamental microfabrication techniques and process flow design. Principles of energy transduction, sensing, and actuation at microscopic scales. Advantages and disadvantages of scaling on performance of MEMS. Analysis and modelling of behaviour of simple MEMS. Students are required to complete a project.

Graduate Studies Notes:

Important dates and deadlines for graduate students are found here: The deadline to drop a course with a 100% refund is the end of week 2. The deadline to drop with no notation on your transcript is the end of week 3.

Registrar Notes:

SFU’s Academic Integrity web site is filled with information on what is meant by academic dishonesty, where you can find resources to help with your studies and the consequences of cheating.  Check out the site for more information and videos that help explain the issues in plain English.

Each student is responsible for his or her conduct as it affects the University community.  Academic dishonesty, in whatever form, is ultimately destructive of the values of the University. Furthermore, it is unfair and discouraging to the majority of students who pursue their studies honestly. Scholarly integrity is required of all members of the University.