Summer 2021 - MSE 311 D100

Introduction to Microelectromechanical Systems (3)

Class Number: 1446

Delivery Method: Remote

Overview

  • Course Times + Location:

    May 12 – Aug 9, 2021: Tue, 12:30–2:20 p.m.
    Burnaby

    May 12 – Aug 9, 2021: Fri, 12:30–1:20 p.m.
    Burnaby

  • Prerequisites:

    MSE 222 (or ENSC 282), MSE 251 (or ENSC 226).

Description

CALENDAR DESCRIPTION:

An introduction to microelectromechanical systems, covering thin film processing technologies, bulk and surface micromachining, and MEMS applications. Students with credit for ENSC 331 may not take MSE 311 for further credit.

COURSE DETAILS:

Microfabrication

  • –Materials; Lithography; Deposition/Growth; Etching; Doping.
Modelling of microdevice mechanics
  • –Statics and dynamics of beams and plates; Thermal conduction and convection; Electro-mechanical conversions; Finite element simulations.
Transduction mechanisms
  • –Electrostatic, Electromagnetic, Thermal, Piezoelectric, Piezoresistive, Optical, Resonance.
Basics of sensor signal processing and machine learning
  • –Noise, Sensor fusion, Supervised and unsupervised learning
Examples of microsystems
  • –Sensors: Pressure, Inertial, Magnetic field, Electric field, Chemical, Thermal, Optical.
  • –Actuators: Micromirrors, Motors, Microfluidic pumps.
  • –Microfluidics.

COURSE-LEVEL EDUCATIONAL GOALS:

It is expected that the students will:

–Become familiar with the major microfabrication techniques and process flows;
–Understand the principles of energy transduction, sensing, and actuation at microscopic scales;
–Analyse and model the behaviour of simple MEMS;
–Understand basic noise sources and methods of mitigating noise issues;
–Employ basic signal processing techniques as applicable to your application.

Grading

  • Assignments 20%
  • Quizzes 70%
  • Labs 10%

Materials

MATERIALS + SUPPLIES:

Both textbooks are available online from SFU library

REQUIRED READING:

Introductory MEMS: Fabrication and application

  By Thomas Adams and Richard Layton

  New York: Springer, 2010.


ISBN: 978-0-387-09511-0

Fabrication and Design of Resonant Microdevices

  By Behraad Bahreyni,

  Elsevier Science, 2008


ISBN: 978-0-8155-1577-7

Registrar Notes:

ACADEMIC INTEGRITY: YOUR WORK, YOUR SUCCESS

SFU’s Academic Integrity web site http://www.sfu.ca/students/academicintegrity.html is filled with information on what is meant by academic dishonesty, where you can find resources to help with your studies and the consequences of cheating.  Check out the site for more information and videos that help explain the issues in plain English.

Each student is responsible for his or her conduct as it affects the University community.  Academic dishonesty, in whatever form, is ultimately destructive of the values of the University. Furthermore, it is unfair and discouraging to the majority of students who pursue their studies honestly. Scholarly integrity is required of all members of the University. http://www.sfu.ca/policies/gazette/student/s10-01.html

TEACHING AT SFU IN SUMMER 2021

Teaching at SFU in summer 2021 will be conducted primarily through remote methods, but we will continue to have in-person experiential activities for a selection of courses.  Such course components will be clearly identified at registration, as will course components that will be “live” (synchronous) vs. at your own pace (asynchronous). Enrollment acknowledges that remote study may entail different modes of learning, interaction with your instructor, and ways of getting feedback on your work than may be the case for in-person classes. To ensure you can access all course materials, we recommend you have access to a computer with a microphone and camera, and the internet. In some cases your instructor may use Zoom or other means requiring a camera and microphone to invigilate exams. If proctoring software will be used, this will be confirmed in the first week of class.

Students with hidden or visible disabilities who believe they may need class or exam accommodations, including in the current context of remote learning, are encouraged to register with the SFU Centre for Accessible Learning (caladmin@sfu.ca or 778-782-3112).