Albert Leung
Professor, School of Engineering Science
Education
Ph.D., Case Western Reserve University, USA, 1981
M.S., Case Western Reserve University, USA, 1977
B.S., Case Western Reserve University, USA, 1974
Research interests
- Low-cost MEMS gyroscope based on thermal principles
- Three-dimensional MEMS
- Nanogap Pirani pressure sensor
- Micromachined accelerometer based on free convection heat transfer
Teaching interests
- Microfabrication and sensor design
- Electronic systems design
Contact:
| Tel: |
778.782.4296 |
| Email: |
aleung@sfu.ca |
| Fax: |
778.782.4951 |
| Office: |
SFU Burnaby, ASB 8833 |
| Personal webpage: | |
Recently taught courses
- ENSC851 Integrated Circuits Technology
Selected recent publications
- K. Khosraviani, J. Bahari, and A. M. Leung, "Robust Micromachining of Compliant Mechanisms by Nickel Silicide", J. Micromech. Microeng. 23 (2013) 015015.
- J. Bahari, J.D. Jones, and A.M. Leung, “Sensitivity improvement of micromachined convective accelerometers,” J. Microectromech. Syst., vol. 21, no. 3, pp. 646-655, June 2012.
- J. Bahari and A.M. Leung, “Micromachined three-axis thermal accelerometer with a single composite heater,” J. Micromech. Microeng., vol. 21, no. 7, pp. 75025-75037, July 2011.
- A.M. Leung, “Low-cost Thermal MEMS Gyroscope,” Hilton Head 2010: A Solid-State Sensors, Actuators and Microsystems Workshop, pp 364-367, Hilton Head Island, South Carolina, June 6-10, 2010.
- K. Khosraviani and A.M. Leung, "The nanogap Pirani — a pressure sensor with superior linearity in atmospheric pressure range," J. Micromech. Microeng. 19, 2009 45007 (8pp).