Pacific Center for Advanced Materials and Microstructures



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PCAMM Facilities and Capabilities

PCAMM provides surface analysis, materials characterization and custom thin film growth for a wide variety of clients, both from within the three universities and from other universities as well as from industry and government. State of the art capabilities are available for thin film growth and for a number of different surface analysis and other materials characterization techniques. 

Growth and deposition equipment

     
  • MBE (molecular beam epitaxy) of ultrathin metallic films, primarily for magnetic applications 
  • MOCVD (metalorganic chemical vapour deposition) of III-V compound semiconductors with emphasis on antimonides, as well as oxide semiconductors such as ZnO.
  • MBE of III-V compound semiconductors and oxide materials such as YAG thin films for photonic devices.
Microfabrication equipment
  • deep uv and electron beam photolithography
  • reactive ion etching
  • plasma assisted cvd deposition
  • sputtering, e-beam and thermal deposition systems
  • extensive class 100 and class 10,000 cleanroom facilities
  • rapid thermal annealing
Analysis techniques
  • SAM - scanning Auger microscopes: SFU, UBC
  • STEM - 200 keV scanning transmission electron microscope: including
  • SEM - scanning electron microscopes
  • SPM - scanning probe microscopes
    • AFM - atomic force microscope
    • STM - scanning tunneling microscope
  • XRD - high resolution X-ray diffractometers
  • XPS - X-ray photoemission spectrometers: SFU, UBC
  • SIMS - secondary ion mass spectrometer


PCAMM
Simon Fraser University
University of British Columbia
BC, Canada 
email: simonw@sfu.ca