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Introduction to Microelectronic Fabrication ENSC 495 (4)

Lectures provide the theory of integrated circuit fabrication. Students fabricate diodes, transistors and test structures in the laboratory. Topics: clean room practice, thermal oxidation and diffusion, photolithography, thin film deposition, etching, ion implantation, packaging, CMOS and bipolar processes. Prerequisite: ENSC 225 or ENSC 226 or MSE 251 or PHYS 365, with a minimum grade of C- and permission of the instructor and a minimum of 80 units. Enrollment in this course is by application only.

Section Instructor Day/Time Location
E200 Michael Adachi
Mo 4:30 PM – 6:20 PM
AQ 5037, Burnaby
LB01 Michael Adachi
We 4:30 PM – 8:20 PM
ASB 8825, Burnaby
LB02 Michael Adachi
Fr 8:30 AM – 12:20 PM
ASB 8825, Burnaby