MEMS and MOEMS
S. Precesky, M. Parameswaran, M. Weber, and M. Syrzycki, CMOS
- Silicon Bonding: A Hybrid Approach for the Fabrication of Integrated
Micromechanical Transducers, Fourth International Forum on ASIC
and Transducer Technology ASICT'91, Louven, Belgium, pp.117-128, May 13-15,
1991.
M. Parameswaran, R. Chung, M. Gaitan, R.B. Johnson, M. Syrzycki, Commercial
CMOS Fabricated Integrated Dynamic Thermal Scene Simulator,
1991 International Electron Devices Meeting IEDM'91, Washington, DC, pp.753-756,
December 8-11, 1991.
G. Chapman, M. Parameswaran, and M. Syrzycki, A
Wafer Scale Thermal Scene Generator, IEEE Conference on Wafer
Scale Integration WSI'92, San Francisco, CA, pp.300-309, January 22-25,
1992.
I. Stoev, M. Syrzycki, M. Parameswaran, G. Chapman, and A. Rawicz, Process
Optimization for Micromachined Silicon Non-Reverse Valve, Sixth
Canadian Semiconductor Conference, Ottawa, Ontario, Aug 11-13, 1992.
I.Stoev, M.Syrzycki, M.Parameswaran, G.Chapman, and A.Rawicz, Process
Optimization for Micromachined Silicon Non-Reverse Valve, Canadian
Journal of Physics, Vol.70, No.10-11, pp.881-885, 1992.
E. Czyzewska, M. Parameswaran, M. Syrzycki, Postprocessing
Etch Characteristics of Mitel Chips, Micromachining Workshop,
Univ. of Alberta, Edmonton, Aug. 13-15, 1994.
B. Ghodsian, M. Parameswaran, M. Syrzycki, Metallic
Microstructures by Electroplating, Canadian Workshop on MEMS,
Waterloo, 19 Feb. 1996.
B. Ghodsian, M. Parameswaran, M. Syrzycki and N. Tait, Fabrication
of Affordable Metallic Microstructures by Electroplating and Photoresist
Molds, 1996 Canadian Conference on Electrical and Computer Engineering,
CCECE'96, Calgary, pp.68-71, May 26-29, 1996.
B. Ghodsian, M. Syrzycki, G. Gries, Microelectromechanical
Probe for an Integrated Electroantennographic System, IEEE 1996
Innovative Systems In Silicon Conference, ISIS'96, Oct 9-11, 1996.
B. Ghodsian, J. Chen, M. Parameswaran, M. Syrzycki, Towards
an Integrated Sub-Nanogram Mass Measurement System, IEEE 1996
Innovative Systems In Silicon Conference, ISIS'96, Oct. 9-11, 1996.
B. Ghodsian, M. Parameswaran, M. Syrzycki, Simple
Technology for Fabricating Micromechanical 3D Structures Using Electroplating
without Photoresist Mold, SPIE Proceedings Vol. 2879, SPIE's
1996 Symposium on Micromachining and Microfabrication, Austin, Texas, USA,
Oct 14-15, 1996.
B. Ghodsian, M. Parameswaran, and M. Syrzycki, Low-Cost
Method for Manufactruring Field Ionization Structures, Symposium
on Microelectronics R&D, Ottawa, Ontario, Jun 16-18, 1997.
B.Ghodsian, M.Syrzycki, A.Parameswaran, Micromachining
Gas Detector Based on Self-Aligned Ionization Tips, SPIE Proc.
Vol. 3514, pp.403-410, SPIE's 1998 Symposium on Micromachining and Microfabrication,
Santa Clara, California, USA, Sep 21-22, 1998.
B. Ghodsian, M. Parameswaran and M. Syrzycki, Gas
Detector with Low-Cost Micromachined Field Ionization Tips,
IEEE Electron Devices Letters, vol. 19, no.7, p.241-243, 1998.
S.Bakshi, A.Haidari, A.Parameswaran, M.Syrzycki, D.Crampton, Reconfigurable
Slit Mask for Multi-Object Spectroscopy, TEXPO 99, Ottawa, Jun
14, 1999.
K. Roberts, M. Parameswaran, M. Moore and M. Syrzycki, Bulk
Micromachined Silicon Aperture for Counting Blood Cells: Fabrication and
Modelling, Device and Process Technologies for MEMS and Microelectronics,
MICRO/MEMS í99, Queensland, Australia, Oct 27-29, 1999.
B. Ghodsian, M. Parameswaran and M. Syrzycki, Low-Cost
Methods for Manufacturing Field Ionization and Emission Structures with
Self-Aligned Gate Electrodes, US Patent 5,989,931, Nov.23,
1999.
S. Bakshi, M. Parameswaran, M. Syrzycki and D. Crampton, Surface
Micromachined Reconfigurable Multi-Slit Mask, Canadian
Jour. Elect. & Comp. Engineering, Vol. 25, No. 1, pp. 9-12, 2000.
M. Syrzycka, M. Sjoerdsma, P. Li, M. Parameswaran, M. Syrzycki, C. Koch,
R. Uthkede, Electronic Concentration of Negatively-Charged
Molecules on a Fabricated Biochip, Analytica Chimica Acta, vol.
484, pp. 1-14, 2003.
A. Rasouli, M. Syrzycki, and B. Bahreyni, Employing Piezojunction
Effect for Ultra-low Power Resonant Microdevice Applications, 18th International
Conference on Solid-State Sensors, Actuators & Microsystems, TRANSDUCERS 2015,
June 21-25, 2015, Anchorage, AK.
For author's copy of the publication, send an e-mail to marek@cs.sfu.ca.