Field Emission SEM and FIB (FEI Dualbeam 235)
Description of Capabilities
- 0.2 - 30 keV field emission gun
- Focused Ion Beam (FIB)
- X-ray detector (EDS) (EDAX, Be detectable)
- SEM Resolution 3 nm (5 keV)
- Backscattered Electron Detector (in lens)
- TEM cross-sectioning capabilities
- organometallic Pt source
- Fixed probe for transfer, and electrical measurements
- electron beam induced current (EBIC)
- fibre optical cable for light inputs
- (Funded by CFI/BCKDF, 2002)