Field Emission SEM and FIB (FEI Dualbeam 235)

      Description of Capabilities

  • 0.2 - 30 keV field emission gun
  • Focused Ion Beam (FIB)
  • X-ray detector (EDS) (EDAX, Be detectable)
  • SEM Resolution 3 nm (5 keV)
  • Backscattered Electron Detector  (in lens)
  • TEM cross-sectioning capabilities
  • organometallic Pt source
  • Fixed probe for transfer, and electrical measurements
  • electron beam induced current (EBIC)
  • fibre optical cable for light inputs
  • (Funded by CFI/BCKDF, 2002)