Overview

Description

CALENDAR DESCRIPTION:

Lectures provide the theory of integrated circuit fabrication. Students fabricate diodes, transistors and test structures in the laboratory. Topics: clean room practice, thermal oxidation and diffusion, photolithography, thin film deposition, etching, ion implantation, packaging, CMOS and bipolar processes.

COURSE DETAILS:

Description

•  Hands-on introduction to Integrated Circuit Fabrication.

• Lectures: theoretical background & application of IC fabrication processes

• Laboratory gives practical experience of each process

• Students build an IC from the bare silicon to final working device.

Prerequisites

• Students need understanding of basic transistor & diode operation.
• ENSC 225 (Microelectronics I) or MSE 251 or PHYS 365 or equivalent.

Course Details

• Clean Room Technology & Silicon Wafer Production
• Thermal Oxidation
• Lithography
• Advanced Lithography
• Etching
• Etching II
• Diffusion Processes & Ion Implementation
• Thin Film Deposition: Chemical Vapor Deposition
• Epitaxy CVD and Dry Etching Processes
• Packaging, Yields, Processing Silicon Foundries
• CMOS and Bipolar Process Integration in Practice
• Future of the Processing

Laboratory Section

Projects in Microfabrication Lab
Students will work in 2-3 people teams which start with a bare silicon wafer and create finished IC's which include
diodes, solar cells, transistors and some characterization test devices. All the process steps will be done by the
students, who will also characterize the parameters for each step. Electrical characterization of the devices (diodes
etc) will also be accomplished. Students get to keep samples of their own IC's. Two Laboratory reports must be
submitted.

Week 1: Lab and Chemical Safety and Tour of Microfabrication facilities
Week 2: Demonstration of laboratory processes
Week 3-5: Growth/patterning of oxide film & P diffusion
Week 6-13: Build simple 4 level structures


Course Organization

• Assignments will be given every 2-3 weeks after the second week of class
• One mid term test (about week 6) and final examination

Tutorial/Problem Workshops

• Tutorials will be held on an as announced basis (not every week but about every 2nd week). These will involveworkshops where a problem is assigned, worked through in groups, and then solutions given. Typically 2 problems per session. Mostly these will be done during the lab portion, but there may be some extra sessions.

Grading

Materials

MATERIALS + SUPPLIES:

Course Website

• Class notes are posted on canvas.sfu.ca.

REQUIRED READING:

RECOMMENDED READING: