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Introduction to Microelectronic Fabrication ENSC 495 (4)

Lectures provide the theory of integrated circuit fabrication. Students fabricate diodes, transistors and test structures in the laboratory. Topics: clean room practice, thermal oxidation and diffusion, photolithography, thin film deposition, etching, ion implantation, packaging, CMOS and bipolar processes. Prerequisite: ENSC 225 or ENSC 226 or MSE 251 or PHYS 365, and permission of the instructor and a minimum of 80 units. Enrolment in this course is by application only.