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Integrated Microsensors and Actuators ENSC 854 (3)

Microelectronic transducer principles, classification, fabrication and application areas. Silicon micromachining and its application to integrated microelectronic sensors and actuators. CMOS compatible micromachining, static, dynamic and kinematic microactuator fabrication. Integrated transducer system design and applications. Students will be required to complete a micromachining project in the microfabrication lab at ENSC. Prerequisite: ENSC 475 and ENSC 495 or permission of instructor.