ENSC495/851: Introduction to Microelectronic Fabrication
SFU Eng. Science Course 2001-1 (Spring)
(ENSC 495, 4 credits, split as 2-0-4: ENSC 851, 3
credits, 2-0-1)
Description
This course gives students a hands-on introduction to Integrated Circuit
Fabrication. The lectures introduce the theoretical background and application
of each major IC fabrication processes: eg. oxidation, doping, depositions,
photolithography and etching. Process simulation tools will be used throughout
to help understand each process. In parallel the laboratory gives
practical experience of each process as part of an IC the students build
from the bare silicon to final working devices
.
Instructors
Professor: Glenn Chapman, Rm ASB 8831,
Phone: 291-3814, email: glennc@cs.sfu.ca
Laboratory Engineer: Bill
Woods, Rm ASB 8832
Prerequisite
The only prerequisites the students need are an understanding of basic
transistor and diode operation. ENSC 222/ENSC 225 (Electronic Design I)
or equivalent.
Lecture Schedule
Lecture Monday, 18:30 - 20:30 pm, Wed. (when no labs) 18:30 - 19:30 pm,
AQ4120
Page maintained by: Prof. Glenn
Chapman
Last updated Jan. 7, 2001