ENSC495/851: Introduction to
Microelectronic Fabrication
SFU Eng. Science Course 2012-1 (Spring)
(ENSC 495, 4 credits, split as 2-0-4: ENSC 851,
3 credits, 2-0-1)
Description
This course gives students a hands-on introduction to Integrated
Circuit Fabrication. The lectures introduce the theoretical
background and application of each major IC fabrication processes:
eg. oxidation, doping, depositions, photolithography and etching.
Process simulation tools will be used throughout to help
understand each process. In parallel the laboratory gives practical
experience of each process as part of an IC the students build from
the bare silicon to final working devices
.
Instructors
Professor: Glenn Chapman, Rm ASB
8831, Phone: 778-782-3814, email: glennc@cs.sfu.ca
Laboratory Engineer:
Slide 3
Andras Szigeti, aszigeti@sfu.ca Rm ASB 8832
TA's: Reza Qarehbaghi, email: rqarehba@sfu.ca
Prerequisite
The only prerequisites the students need are an understanding of
basic transistor and diode operation. ENSC 222/ENSC 225 (Electronic
Design I) or equivalent.
Lecture Schedule
Lecture Tuesday, 16:30-18:20, AQ5016
Labs: LA02 Wed. 18:30-22:20, ASB 8825
LA01 Thur.
14:30-18:20, ASB 8825
Page maintained by: Prof.
Glenn
Chapman
Last updated Mar. 26, 2012