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ENSC331: Introduction to MEMS

Instructor:

Dr Behraad Bahreyni

Lectures in SUR 3170:

Mondays: 2:30pm to 4:20pm
Wednesdays: 2:30pm to 3:20pm

Syllabus:

(1) Microfabrication
Overview of crystals, Lithography, Oxidation, Wet etching, Doping, Introduction to plasma, Physical vapour deposition, Chemical vapour deposition, Dry etching, Packaging.
(2) Transduction mechanisms
Electrostatic, Electromagnetic, Thermal, Piezoelectric, Piezoresistive, Optical, Resonance.
(3) Modelling of microdevices
Modelling of statics and dynamics of microstructures, FEA.
(4) MEMS applications
Sensors: Pressure, Inertial, Magnetic field, Electric field, Chemical, Thermal, Optical;
Actuators: Micromirrors, Motors, Microfluidic pumps;
Signal processing: Timing resonators, Filters;
BioMEMS.

Office hours:

Mondays and Wednesdays from 16:30 to 17:30

Textbook (required):

Introductory MEMS: Fabrication and Applications,By T. Adams and R. Layton, Springer, 2010

Further reading:

  • Microsystem Design by Stephen D. Senturia, Kluwer, 2001.
  • An Introduction to Microelectromechanical Systems Engineering by N. Maluf & K. Williams, 2nd Ed, Artech House, 2004.
  • Fundamentals of Microfabrication by Marc J. Madou, CRC, 2009.


I put all the relevant course material on WebCT.