ENSC893: Modelling and characterisation of microdevices
Instructor:
Dr Behraad Bahreyni
Lectures:
Thursdays, 3pm to 6pm in AQ5050 (Burnaby campus)
Syllabus:
Fabrication
Overview of crystals; Lithography; Oxidation; Wet etching; Doping; Introduction to plasma; Physical vapour deposition; Chemical vapour deposition; Dry etching.
Transduction mechanisms
Electrostatic, Electromagnetic, Thermal, Piezoelectric, Piezoresistive, Optical, Resonance.
Process characterisation
Thin film stress/thickness measurement; AFM; SEM; STM; XRD; XPS.
Modelling of microdevices
Modeling of statics and dynamics of beams and plates; Thermal conduction and convection; Approximate methods; Electro-mechanical conversions; FEA.
Characterisation of microdevices
Electrical measurement techniques; Mechanical characterisation; Optical measurement techniques.
Micromachined transducers
Sensors: Pressure, Inertial, Magnetic field, Electric field, Chemical, Thermal, Optical.
Actuators: Micromirrors, Motors, Microfluidic pumps.
Office hours:
Tuesday 16:00 to 17:00 in ASB 8855 (Burnaby campus)
Wednesdays 13:00 to 14:00 in MSE 4378 (Surrey campus)
Recommended textbooks (not required):
- Microsystem Design by Stephen D. Senturia, Kluwer, 2001.
- MEMS and Microsystems by Tai-Ran Hsu, Wiley, 2008.
- MEMS Mechanical Sensors by Steve P. Beeby et al, Artech House, 2004.
- Fundamentals of Microfabrication by Marc J. Madou, CRC, 2009.
I put all the relevant course material on WebCT.