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| Details and Examples |
| See PARETO7 in the SAS/QC Sample Library |
During the manufacture of a metal-oxide semiconductor (MOS) capacitor, causes of failures were recorded before and after a tube in the diffusion furnace was cleaned. This information was saved in a SAS data set named FAILURE3.
data failure3;
length cause $ 16 stage $ 16 ;
label cause = 'Cause of Failure' ;
input stage $ 1-16 cause $ 19-34 counts;
datalines;
Before Cleaning Contamination 14
Before Cleaning Corrosion 2
Before Cleaning Doping 1
Before Cleaning Metallization 2
Before Cleaning Miscellaneous 3
Before Cleaning Oxide Defect 8
Before Cleaning Silicon Defect 1
After Cleaning Doping 0
After Cleaning Corrosion 2
After Cleaning Metallization 4
After Cleaning Miscellaneous 2
After Cleaning Oxide Defect 1
After Cleaning Contamination 12
After Cleaning Silicon Defect 2
;
To compare distribution of failures before and after cleaning, you can create two separate Pareto charts, one for the observations in which STAGE is equal to Before Cleaning and one for the observations in which STAGE is equal to After Cleaning. You can do this with the BY statement.
proc sort data=failure3;
by stage;
title 'Pareto Effect of Furnace Tube' ;
proc pareto data=temp1;
vbar cause / freq = counts
angle = -60
cframe = ligr
cbars = vigb
cconnect = salmon;
by stage;
run;
The SORT procedure sorts the observations in order of the values
of STAGE. It is not necessary to sort by the values of CAUSE
since this is done by the PARETO procedure. The two charts,
displayed in Output 29.1.1 and Output 29.1.2,
reveal a reduction in oxide defects after the tube was
cleaned. This is a relative reduction, since the
primary axes are scaled in percent units.
Output 29.1.1: "After" Analysis Using STAGE as a BY Variable
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In general, it is difficult to compare Pareto charts created with BY processing because their axes are not necessarily uniform. A better approach is to construct a comparative Pareto chart, as illustrated by the following statements:
title 'Comparison of IC Failures' ;
proc pareto data=failure3;
vbar cause / class = stage
freq = counts
intertile = 1.0
classkey = 'Before Cleaning'
cframeside = ligr
cframe = ligr
cbars = vigb
cconnect = salmon;
run;
| See PARETO8 in the SAS/QC Sample Library |
The CLASS= option designates STAGE as a classification variable, and this directs the procedure to create the one-way comparative Pareto chart, shown in Output 29.1.3, that displays a component chart for each level of STAGE.
Output 29.1.3: Before-and-After Analysis Using Comparative Pareto Chart
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In many applications, it may be more revealing to base comparisons on counts rather than percents. The following statements construct a chart with a frequency scale:
title 'Comparison of IC Failures' ;
proc pareto data=failure3;
vbar cause / class = stage
freq = counts
scale = count
intertile = 1.0
nlegend = 'Total Circuits'
cframenleg = ywh
cprop = yellow
classkey = 'Before Cleaning'
cframe = ligr
cbars = vigb
cconnect = salmon
cframeside = ligr;
run;
The chart is shown in Output 29.1.4.
Output 29.1.4: Before-and-After Analysis Using Comparative Pareto Chart
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Note that the lower cumulative percent curve in Output 29.1.4 is not anchored to the first bar. This is a consequence of the uniform frequency scale and of the fact that the number of observations in each cell is not the same.
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