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| Details and Examples |
| See PARETO9 in the SAS/QC Sample Library |
During the manufacture of a MOS capacitor, different cleaning processes were used by two manufacturing systems operating in parallel. Process A used a standard cleaning solution, while Process B used a different cleaning mixture that contained less particulate matter. The failure causes observed with each process for five consecutive days were recorded and saved in a SAS data set called FAILURE4.
data failure4;
label cause = 'Cause of Failure' ;
input process $ 1-9 day $ 13-19 cause $ 23-36 counts 40-41;
datalines;
Process A March 1 Contamination 15
Process A March 1 Corrosion 2
Process A March 1 Doping 1
Process A March 1 Metallization 2
Process A March 1 Miscellaneous 3
Process A March 1 Oxide Defect 8
Process A March 1 Silicon Defect 1
Process A March 2 Contamination 16
Process A March 2 Corrosion 3
Process A March 2 Doping 1
Process A March 2 Metallization 3
Process A March 2 Miscellaneous 1
Process A March 2 Oxide Defect 9
Process A March 2 Silicon Defect 2
Process A March 3 Contamination 20
Process A March 3 Corrosion 1
Process A March 3 Doping 1
Process A March 3 Metallization 0
Process A March 3 Miscellaneous 3
Process A March 3 Oxide Defect 7
Process A March 3 Silicon Defect 2
Process A March 4 Contamination 12
Process A March 4 Corrosion 1
Process A March 4 Doping 1
Process A March 4 Metallization 0
Process A March 4 Miscellaneous 0
Process A March 4 Oxide Defect 10
Process A March 4 Silicon Defect 1
Process A March 5 Contamination 23
Process A March 5 Corrosion 1
Process A March 5 Doping 1
Process A March 5 Metallization 0
Process A March 5 Miscellaneous 1
Process A March 5 Oxide Defect 8
Process A March 5 Silicon Defect 2
Process B March 1 Contamination 8
Process B March 1 Corrosion 2
Process B March 1 Doping 1
Process B March 1 Metallization 4
Process B March 1 Miscellaneous 2
Process B March 1 Oxide Defect 10
Process B March 1 Silicon Defect 3
Process B March 2 Contamination 9
Process B March 2 Corrosion 0
Process B March 2 Doping 1
Process B March 2 Metallization 2
Process B March 2 Miscellaneous 4
Process B March 2 Oxide Defect 9
Process B March 2 Silicon Defect 2
Process B March 3 Contamination 4
Process B March 3 Corrosion 1
Process B March 3 Doping 1
Process B March 3 Metallization 0
Process B March 3 Miscellaneous 0
Process B March 3 Oxide Defect 10
Process B March 3 Silicon Defect 1
Process B March 4 Contamination 2
Process B March 4 Corrosion 2
Process B March 4 Doping 1
Process B March 4 Metallization 0
Process B March 4 Miscellaneous 3
Process B March 4 Oxide Defect 7
Process B March 4 Silicon Defect 1
Process B March 5 Contamination 1
Process B March 5 Corrosion 3
Process B March 5 Doping 1
Process B March 5 Metallization 0
Process B March 5 Miscellaneous 1
Process B March 5 Oxide Defect 8
Process B March 5 Silicon Defect 2
;
In addition to the process variable CAUSE, there are two
classification variables in this data set: PROCESS and DAY.
The variable COUNTS is a frequency variable.
This example creates a series of displays that progressively use more of the classification information.
title 'Pareto Analysis of Capacitor Failures' ;
proc pareto data=failure4;
vbar cause / freq = counts
last = 'Miscellaneous'
scale = count
anchor = bl
cframe = ligr
cbars = vigb
cconnect = salmon
nlegend ;
run;
The chart, shown in Output 29.2.1, indicates that contamination is the most frequently occurring problem.
Output 29.2.1: Pareto Analysis without Classification Variables
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The option ANCHOR=BL anchors the cumulative percent curve at the bottom left (BL) of the first bar. The NLEGEND option adds a sample size legend.
title 'Pareto Analysis by Cleaning Process' ;
proc pareto data=failure4;
vbar cause / class = process
freq = counts
last = 'Miscellaneous'
scale = count
catleglabel = 'Failure Causes:'
intertile = 1.0
cframe = ligr
cbars = vigb
cframeside = ligr
nohlabel
nocurve
nlegend ;
run;
Output 29.2.2: One-Way Comparative Pareto Analysis with CLASS=PROCESS
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The CATLEGLABEL= option specifies the category legend label Failure Causes:. The NOHLABEL option suppresses the horizontal axis labels. The NOCURVE option suppresses the cumulative percent curve.
The following statements specify DAY as a classification variable:
title 'Pareto Analysis by Day';
proc pareto data=failure4;
vbar cause / class = day
freq = counts
last = 'Miscellaneous'
scale = count
cbars = vigb
cframe = ligr
cframetop = ligr
catleglabel = 'Failure Causes:'
intertile = 1.0
nrows = 1
ncols = 5
vref = 5 10 15 20
lvref = 34
nohlabel
nocurve
nlegend ;
run;
The NROWS= and NCOLS= options display the cells in a side-by-side arrangement. The VREF= and LVREF= options add reference lines. The chart is displayed in Output 29.2.3.
Output 29.2.3: One-Way Comparative Pareto Analysis with CLASS=DAY
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title 'Pareto Analysis by Process and Day' ;
proc pareto data=failure4;
vbar cause / class = ( process day )
freq = counts
nrows = 2
ncols = 5
cbars = vigb
cframe = ligr
cframetop = ligr
cframeside = ligr
last = 'Miscellaneous'
scale = count
catleglabel = 'Failure Causes:'
intertile = 1.0
nohlabel
nocurve
nlegend ;
run;
The chart is displayed in Output 29.2.4.
Output 29.2.4: Two-Way Comparative Pareto Analysis for PROCESS and DAY
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