Simon Fraser University
Engaging the World

Course Outlines

Summer 2024 - MSE 311 D100

Introduction to Microelectromechanical Systems (3)

Class Number: 1162

Delivery Method: In Person

Overview

  • Course Times + Location:

    May 6 – Aug 2, 2024: Mon, 2:30–3:20 p.m.
    Surrey

    May 6 – Aug 2, 2024: Thu, 2:30–4:20 p.m.
    Surrey

  • Prerequisites:

    MSE 222 (or ENSC 282), MSE 251 (or ENSC 226).

Description

CALENDAR DESCRIPTION:

An introduction to microelectromechanical systems, covering thin film processing technologies, bulk and surface micromachining, and MEMS applications. Students with credit for ENSC 331 may not take MSE 311 for further credit.

COURSE DETAILS:

Microfabrication

  • –Materials; Lithography; Deposition/Growth; Etching; Doping.
Modelling of microdevice mechanics
  • –Statics and dynamics of beams and plates; Thermal conduction and convection; Electro-mechanical conversions; Finite element simulations.
Transduction mechanisms
  • –Electrostatic, Electromagnetic, Thermal, Piezoelectric, Piezoresistive, Optical, Resonance.
Examples of microsystems
  • –Sensors: Pressure, Inertial, Magnetic field, Electric field, Chemical, Thermal, Optical.
  • –Actuators: Micromirrors, Motors, Microfluidic pumps.
  • –Microfluidics.

COURSE-LEVEL EDUCATIONAL GOALS:

It is expected that the students will:

–Become familiar with the major microfabrication techniques and process flows;
–Understand the principles of energy transduction, sensing, and actuation at microscopic scales;
–Analyse and model the behaviour of simple MEMS.
 

Grading

  • Assignments 20%
  • Exams 60%
  • Labs 20%

Materials

MATERIALS + SUPPLIES:

Fabrication and Design of Resonant Microdevices
By Behraad Bahreyni,
Elsevier Science, 2008

Introductory MEMS: Fabrication and application
By Thomas Adams and Richard Layton
New York: Springer, 2010.

Both textbooks are available online from SFU library

REQUIRED READING:

Introductory MEMS: Fabrication and application

  By Thomas Adams and Richard Layton

  New York: Springer, 2010.


ISBN: 978-0-387-09511-0

Fabrication and Design of Resonant Microdevices

  By Behraad Bahreyni,

  Elsevier Science, 2008


ISBN: 978-0-8155-1577-7

Registrar Notes:

ACADEMIC INTEGRITY: YOUR WORK, YOUR SUCCESS

SFU’s Academic Integrity website http://www.sfu.ca/students/academicintegrity.html is filled with information on what is meant by academic dishonesty, where you can find resources to help with your studies and the consequences of cheating. Check out the site for more information and videos that help explain the issues in plain English.

Each student is responsible for his or her conduct as it affects the university community. Academic dishonesty, in whatever form, is ultimately destructive of the values of the university. Furthermore, it is unfair and discouraging to the majority of students who pursue their studies honestly. Scholarly integrity is required of all members of the university. http://www.sfu.ca/policies/gazette/student/s10-01.html