Albert Leung

Professor, School of Engineering Science

Education

Ph.D., Case Western Reserve University, USA, 1981
M.S., Case Western Reserve University, USA, 1977
B.S., Case Western Reserve University, USA, 1974

Research interests

  • Low-cost MEMS gyroscope based on thermal principles
  • Three-dimensional MEMS
  • Nanogap Pirani pressure sensor
  • Micromachined accelerometer based on free convection heat transfer

Teaching interests

  • Microfabrication and sensor design
  • Electronic systems design

Contact:

Tel:
778.782.4296
Email:
aleung@sfu.ca
Fax:
778.782.4951 
Office:
SFU Burnaby, ASB 8833
Personal webpage:

Recently taught courses

  • ENSC851 Integrated Circuits Technology

Selected recent publications

  • Jamal Bahari, Rui Feng, and Albert M. Leung, “Robust MEMS Gyroscope Based on Thermal Principles” J. Microectromech. Syst., vol. 23, no. 1, pp. 100-116 February 2014
  • Rui Feng, Jamal Bahari, John Dewey Jones, Albert M. Leung, "MEMS thermal gyroscope with self-compensation of the linear", Sensors and Actuators A 203 (2013) 413– 420.
  • K. Khosraviani, J. Bahari, and A. M. Leung, "Robust Micromachining of Compliant Mechanisms by Nickel Silicide", J. Micromech. Microeng. 23 (2013) 015015.
  • J. Bahari, J.D. Jones, and A.M. Leung, “Sensitivity improvement of micromachined convective accelerometers,” J. Microectromech. Syst., vol. 21, no. 3, pp. 646-655, June 2012.
  • J. Bahari and A.M. Leung, “Micromachined three-axis thermal accelerometer with a single composite heater,” J. Micromech. Microeng., vol. 21, no. 7, pp. 75025-75037, July 2011.
  • A.M. Leung, “Low-cost Thermal MEMS Gyroscope,” Hilton Head 2010: A Solid-State Sensors, Actuators and Microsystems Workshop, pp 364-367, Hilton Head Island, South Carolina, June 6-10, 2010.
  • K. Khosraviani and A.M. Leung, "The nanogap Pirani — a pressure sensor with superior linearity in atmospheric pressure range," J. Micromech. Microeng. 19, 2009 45007 (8pp).
  • R.W. Johnstone, A.H. Ma, D. Sameoto, M. Parameswaran, and A.M. Leung, "Buckled cantilevers for out-of-plane platforms," J. Micromech. Microeng. 18, 2008 045024 (7pp).