Albert Leung

Professor, School of Engineering Science


Ph.D., Case Western Reserve University, USA, 1981
M.S., Case Western Reserve University, USA, 1977
B.S., Case Western Reserve University, USA, 1974

Research interests

  • Low-cost MEMS gyroscope based on thermal principles
  • Three-dimensional MEMS
  • Nanogap Pirani pressure sensor
  • Micromachined accelerometer based on free convection heat transfer

Teaching interests

  • Microfabrication and sensor design
  • Electronic systems design


SFU Burnaby, ASB 8833
Personal webpage:

Recently taught courses

  • ENSC851 Integrated Circuits Technology

Selected recent publications

  • Jamal Bahari, Rui Feng, and Albert M. Leung, “Robust MEMS Gyroscope Based on Thermal Principles” J. Microectromech. Syst., vol. 23, no. 1, pp. 100-116 February 2014
  • Rui Feng, Jamal Bahari, John Dewey Jones, Albert M. Leung, "MEMS thermal gyroscope with self-compensation of the linear", Sensors and Actuators A 203 (2013) 413– 420.
  • K. Khosraviani, J. Bahari, and A. M. Leung, "Robust Micromachining of Compliant Mechanisms by Nickel Silicide", J. Micromech. Microeng. 23 (2013) 015015.
  • J. Bahari, J.D. Jones, and A.M. Leung, “Sensitivity improvement of micromachined convective accelerometers,” J. Microectromech. Syst., vol. 21, no. 3, pp. 646-655, June 2012.
  • J. Bahari and A.M. Leung, “Micromachined three-axis thermal accelerometer with a single composite heater,” J. Micromech. Microeng., vol. 21, no. 7, pp. 75025-75037, July 2011.
  • A.M. Leung, “Low-cost Thermal MEMS Gyroscope,” Hilton Head 2010: A Solid-State Sensors, Actuators and Microsystems Workshop, pp 364-367, Hilton Head Island, South Carolina, June 6-10, 2010.
  • K. Khosraviani and A.M. Leung, "The nanogap Pirani — a pressure sensor with superior linearity in atmospheric pressure range," J. Micromech. Microeng. 19, 2009 45007 (8pp).
  • R.W. Johnstone, A.H. Ma, D. Sameoto, M. Parameswaran, and A.M. Leung, "Buckled cantilevers for out-of-plane platforms," J. Micromech. Microeng. 18, 2008 045024 (7pp).