Welcome to the Automated Design for Micromachining main page.
The purpose of this site is to make public several tools we have developed at Simon Fraser University (SFU) to leverage the advanced design capabilities of Cadence in our micro-electrical-mechanical systems (MEMS) designs. These tools allow designers to automated certain aspects of the design process. The techniques presented here fall under two categories: multi-part paths and parameterized cells.
While the techniques are generally applicable, the examples at this site are targeted mostly at the Polysilicon Multi-User MEMS Processes (PolyMUMPs®), which is offered by the MEMSCAP. However, these cells have been used with other surface-micromachining processes, although some adaptation may be required.
The cells under the geometry library are not technology specific. The geometry cells should work with any Cadence library without modification.
Multi-part paths consists of several paths that are linked. The main use of this feature in MEMS is to create conducting lines. For example, a properly designed conducting line fabricated using the MUMPS process requires five layers. Laying out all of these paths by hand is tedious and error prone. Using multi-part paths, a single path is laid out and Cadence will construct the rest so that the design rules are met.
Please follow this link for more information.
Parameterized cells can greatly reduce design time. When an instance of a cell is placed in your design, you can modify several parameters of the design and so customize it to fit your needs. This saves designers from redesigning the same parts over and over just because a particular parameter may need to be changed. Parameterized cells are also an important technique for promoting re-use. A decent library of basic components allows designers to focus on higher level design elements.
Before installing any of the parameterized cells into a library, some additional information must be added to that library. These modifications involve ensuring that some utility functions are available, and that important technology information is provided. The details of this process are listed on the parameterized cells page.
Please refer to the menu, at the left, for a full listing of the cells available.