Automated Design for Micromachining



This parameterized is used to create a mechanical tether to tie down a component to the substrate. One end of the tether is alwasy anchored to the substrate. A path that is designed to be readily broken, either mechanically or electrically, is then created next to the anchor.

Layout for a POLY1 tether.

Figure 1: Layout for a POLY1 tether.

Layout for a POLY2 tether.

Figure 2: Layout for a POLY2 tether.


Any parameter may be modified, if necessary, to meet design rules. Typically, this involves increasing parameters that specify distances, so that minimum line width and minimum line spacing rules will not be violated. This has been extended to the convention of specifying a zero for some parameters to obtain an instance of the minimum size.

In addition to the parameters listed below, several technology parameters also influence the implementation of parameterized cells. This data must be present in the technology library.

Table 1: Parameters for the 'tether' parameterized cell.
Name Description Range Units
layer This parameter determines whether the tether is drawn using POLY1, POLY2, or as a double-thickness structure. P1/P2/DT -
length 1 The distance between the tip of the tether and the loop. [0,∞) um
length 2 The distance that the tether's loop extends. [0,∞) um
length 3 The distance between the anchor of the tether and the loop. [0,∞) um
width The width of the path that connected the tether's tip and the anchor. [0,∞) um
chamfer This is the length along each corner that will be chopped. Typically, this parameter should is zero. However, it can be increased to reduced spurious DRC violations in non-manhattan geometries. Please note that under some circumstances, adding chamfer can create a staple with improperly sized notches. This condition should be readily noticeable upon inspection of the design. [0,∞) um


The documentation for this parameterized cell does not contain any references.