Automated Design for Micromachining

Strain Gauge


This pcell creates a dual bent-beam strain-gauge.


Any parameter may be modified, if necessary, to meet design rules. Typically, this involves increasing parameters that specify distances, so that minimum line width and minimum line spacing rules will not be violated. This has been extended to the convention of specifying a zero for some parameters to obtain an instance of the minimum size.

In addition to the parameters listed below, several technology parameters also influence the implementation of parameterized cells. This data must be present in the technology library.

Table 1: Parameters for the 'strain_gauge' parameterized cell.
Name Description Range Units P1 P2 DT
length The length of the meter. The meter may actually be longer than specified if the specified length is not divisible by the layer's minimum width and spacing without remainder. [0,∞) um + + +
include_poly0 Check this box to include a POLY0 ground plane under the meter. true/false - + + +


The documentation for this parameterized cell does not contain any references.